JPH0645209Y2 - 半導体差圧流量計 - Google Patents
半導体差圧流量計Info
- Publication number
- JPH0645209Y2 JPH0645209Y2 JP1988006690U JP669088U JPH0645209Y2 JP H0645209 Y2 JPH0645209 Y2 JP H0645209Y2 JP 1988006690 U JP1988006690 U JP 1988006690U JP 669088 U JP669088 U JP 669088U JP H0645209 Y2 JPH0645209 Y2 JP H0645209Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- differential pressure
- fluid
- orifice
- fluid passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 239000012530 fluid Substances 0.000 claims description 58
- 239000000758 substrate Substances 0.000 claims description 57
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 239000011521 glass Substances 0.000 claims description 7
- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 238000001514 detection method Methods 0.000 description 14
- 238000005530 etching Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988006690U JPH0645209Y2 (ja) | 1988-01-22 | 1988-01-22 | 半導体差圧流量計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988006690U JPH0645209Y2 (ja) | 1988-01-22 | 1988-01-22 | 半導体差圧流量計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01112420U JPH01112420U (en]) | 1989-07-28 |
| JPH0645209Y2 true JPH0645209Y2 (ja) | 1994-11-16 |
Family
ID=31211067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988006690U Expired - Lifetime JPH0645209Y2 (ja) | 1988-01-22 | 1988-01-22 | 半導体差圧流量計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645209Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3604059B2 (ja) * | 1998-07-17 | 2004-12-22 | 株式会社堀場製作所 | 部分希釈方式のガス希釈システム |
| JP5656191B2 (ja) * | 2011-01-07 | 2015-01-21 | 国立大学法人 東京大学 | 流速センサ |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59120425U (ja) * | 1983-01-31 | 1984-08-14 | 三洋電機株式会社 | 流量計 |
-
1988
- 1988-01-22 JP JP1988006690U patent/JPH0645209Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01112420U (en]) | 1989-07-28 |
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